Announcement and Call for Abstracts

MINISYMPOSIUM ON COMPUTATIONAL MECHANICS APPLIED TO SEMICONDUCTOR AND MICROELECTRONIC TECHNOLOGY

To be held at the Fifth U.S. National Congress on Computational Mechanics Wednesday-Friday, August 4-6 1999, University of Colorado at Boulder, CO, USA

Symposium Organizers: K. Garikipati and R. W. Dutton

This Minisymposium will provide a forum for discussion of reigning and emerging applications of computational mechanics to problems arising in the context of semiconductor technology. Treatment of the inherent mechanics and application of numerical methods to such problems are widespread. However, up to this point, there has been little concerted effort at addressing this very broad area from the standpoint of the computational mechanics community. The proposed minisymposium aims to fill this vacancy.

Contributions are sought that deal with issues of mechanics, thermodynamics and numerical methods in the following areas:

  • Modelling of thermal oxidation
  • Modelling of diffusion equations in integrated circuit processing
  • Micro electro mechanical systems (MEMS)
  • Microfluidics
  • Mechanics of dielectric materials
  • Coupled stress-diffusion models
  • Electromigration
  • Micro opto mechanical systems (MOMS)
  • Semiconductor device modeling
  • Levelset methods applied to moving boundaries and interfaces

    • Submission Instructions:

    If you are interested in contributing to this MiniSymposium, please submit a one-page abstract of up to 400 words by e-mail to krishna@gloworm.stanford.edu or aluru@uiuc.edu on or before March 1, 1999. All correspondence will take place by e-mail. Only ASCII files will be accepted. Please do not send encoded files. Abstracts sent by Fax or regular mail will not be considered. Abstracts may be submitted in one of two f orms: (1) plain text, (2) TeX source compatible with the Plain TeX format. Please do n ot include figures or graphics. Avoid equations in title or text. Greek letters are acceptable if the abstract is submitted in TeX. For samples of forms (1) and (2 ) click links in http://civil.colorado.edu/usnccm99/Abstracts.d/Instructions.html If the abstract is co-authored it must identify the e-mail of the corresponding author.

    Symposium organizers:

    Krishna Garikipati, Center for Integrated Systems, 302X, Stanford University, Stanford, CA 94305, krishna@gloworm.stanford.edu, ph. (650)725-6240, fax. (650)725-7731

    Robert W. Dutton, Center for Integrated Systems, 333X, Stanford University, Stanford, CA 94305, dutton@gloworm.stanford.edu, ph. (650)723-4138, fax. (650)725-7731

    Narayana R. Aluru, 117 Transportation, MC 238, 104 S Matthews, Urbana, IL 61801, aluru@uiuc.edu, ph. (217)333-1180.

    Congress Program and Registration Information:

    http://civil.colorado.edu/usnccm99